1.The laser erin ori ati awọn ayẹwo ayẹwo ipele ti wa ni ese, awọn be jẹ gidigidi idurosinsin, ati awọn egboogi-kikọlu jẹ lagbara.
2.Precision probe positioning device, laser spot alignment toles is very easy
3.Single-axis wakọ ayẹwo laifọwọyi sunmọ iwadi naa ni inaro, ki abẹrẹ abẹrẹ jẹ papẹndikula si ọlọjẹ ayẹwo
4.Awọn ọna ifunni abẹrẹ ti o ni oye ti iṣakoso piezoelectric seramiki ti a ti n ṣakoso ẹrọ ti n ṣakoso ni wiwa laifọwọyi n ṣe aabo fun iwadii ati apẹẹrẹ.
5.Automatic opitika ipo, ko si ye lati idojukọ, akoko gidi akiyesi ati ipo ti agbegbe ayẹwo ayẹwo ayẹwo
6.Spring suspension shockproof ọna, o rọrun ati ki o wulo, ti o dara shockproof ipa
7.Metal shielded soundproof box,-itumọ ti ni ga-konge otutu ati ọriniinitutu sensọ, gidi-akoko ibojuwo ti awọn ṣiṣẹ ayika
8.Integrated scanner aiṣe-atunṣe atunṣe olumulo olumulo, isọdi nanometer ati deede wiwọn dara ju 98%
| Ipo iṣẹ | ipo ifọwọkan, ipo tẹ ni kia kia |
| Ipo yiyan | Iyapa/Agbofinro Lateran, titobi/Alakoso, Oofa/Agbofinro Itanna |
| ipa julọ.Oniranran ti tẹ | FZ agbara ti tẹ, RMS-Z ti tẹ |
| Iwọn ọlọjẹ XY | 20 * 20um, iyan 50 * 50um, 100 * 100um |
| Iwọn ọlọjẹ Z | 2.5um, iyan 5um, 10um |
| Ṣiṣayẹwo ipinnu | Petele 0.2nm, Inaro 0.05nm |
| Iwọn apẹẹrẹ | Φ≤90mm, H≤20mm |
| Ayẹwo irin-ajo ipele | 15*15mm |
| Opitika akiyesi | 4X opitika ohun lẹnsi / 2.5um ipinnu |
| Iyara wíwo | 0.6Hz-30Hz |
| Igun ọlọjẹ | 0-360° |
| Ayika iṣẹ | Windows XP/7/8/10 ẹrọ |
| Ibaraẹnisọrọ Interface | USB2.0/3.0 |
| Apẹrẹ-gbigbọn-mọnamọna | Orisun ti daduro / Irin Shielded Box |
